Meyer Burger Logo






Address: An der Baumschule 6-8, 09337 Hohenstein-Ernstthal, Germany

Contact Person: Markus Tilgner (Area Sales Manager)

Telefon: +49 3723 6713 657

Fax: +49 3723 6711 000



Meyer Burger (Germany) AG – BU MicroSystems

Drawing upon broad experience and expertise, Meyer Burger (Germany) AG – BU MicroSystems is a worldwide operating company that provides advanced technology solutions for high-precision coating, structuring and processing of surface areas through the application of plasma and ion beam technologies. The process systems feature a modular composition that ensures a flexible adaption to various methods of surface treatment, such as reactive ion etching (RIE), plasma-enhanced chemical vapor deposition (PECVD) or ion beam etching and deposition (IBE, IBD). The complex systems are mainly used in the semiconductor industry, precision optics and sensor manufacturing as well as in laboratory applications. The company has long customer relationships with leading industrial and academic research institutions. The product range of MicroSystems ranges from systems for wafer processing on large-scale applications to strip processing plants, on which a wide range can be realized in technical processes. The systems primarily differ from competitors by the proprietary in-house developed key components such as plasma and ion beam sources.


MeyerBurger_microsys-500 MeyerBurger_staff-at-work MeyerBurger_PECVD_PVD